MICROMECHANICALLY PRODUCED FLOW-RESTRICTION DEVICE

摘要

The invention concerns a micromechanically produced flow-restriction device in which a through-opening (12) is formed in a first main surface of a substrate (10). Formed in a second main surface of the substrate (10) is a duct (16) which is connected for flow purposes to the through-opening (12). A membrane (22) formed in the substrate (10) is connected for flow purposes to the through-opening (12) and comprises a membrane electrode (26) formed at least on the membrane (22). A cover device (30) is mounted on the second main surface of the substrate (10) such that the cover device (30) and the duct (16) define a flow resistance means for the flow-restriction device, the cover device (30) comprising a counter electrode (32) which lies opposite and at a spacing from the membrane electrode (26), such that the membrane electrode (26) and the counter electrode (32) define a capacitive pressure sensor.