CATHODE PULVERISATION TARGETS IN ALUMINIUM ALLOY

摘要

The invention concerns a cathode pulverisation target characterised in that its active part, i.e. the volume of the target capable of being removed during the cathode pulverisation, consists of a high purity aluminium alloy simultaneously containing copper and iron and having simultaneously a recrystallisation temperature well above 20 DEG C and an electric resistivity less than 2.85 mu OMEGA .cm at 20 DEG C. The use of the target for making bonding circuits reduces the frequency at which voids and hillocks appear, while maintaining the resistance of the bonding circuits at values comparable to the resistance obtained with a high purity aluminium alloy, while also providing the etching characteristics comparable to those of high purity aluminium alloy.