| 摘要 |
PURPOSE:To provide a means for simplifying a workpiece set and facilitating a wafer taken out in a multiwire saw. CONSTITUTION:A dummy member 20 of L-shaped section is fixed onto a base 9 mounted to a workpiece press-up base 10 of a multiwire saw of one-way running type. A work piece is loaded, so that its side surface part 6-4 is brought into contact with a side plate part 20-2, on a bottom plate part 20-1 of this L-shaped dummy member 20. At the time of cutting by a wire of running in a direction of one way, while grinding resistance acting on the workpiece is supported by the side plate part 20-2 of the dummy member, the workpiece is cut into the dummy member bottom plate part. After cutting, a wafer placed on the dummy member is taken out. In this way, setting of the workpiece to the multiwire saw is simplified. Taking out the wafer is facilitated. A rate of operation of the multiwire saw is increased. The wafer of high quality with no saw mark is obtained. |
