发明名称
摘要 <p>This invention discloses a method for making a silicon field emission device which ensures in the higher electron emission effect at the same voltage required for field emission by shrinking the diameter of a gate aperture to make the field emission structure sharp. The shrinkage effect of the gate aperture of about 42-45% may be achieved in accordance with this invention.</p>
申请公布号 JP2763248(B2) 申请公布日期 1998.06.11
申请号 JP19930094796 申请日期 1993.03.16
申请人 SANSEI DENKAN KK 发明人 RI KOOGU
分类号 H01J1/304;H01J9/02;H01J31/12;(IPC1-7):H01J9/02 主分类号 H01J1/304
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