Control of micro-mechanically and electrostatically driven swivelling mirror arrangement

摘要

The control is described of micro-mechanically and electrostatically driven mirror arrangements with two fixed electrodes and a moving electrode located above or between them plus a pivoting mirror plate representing an electrode. An oscillator (1) and a generator (2) are wired together with their outputs at each input of a mixer (3). The output of the mixer is connected to the control terminal of an electronic switch. The first of two contact terminals of this switch goes to earth and the other goes to the primary winding of a transformer (5). The two contact terminals are high or low resistance ones according to the potential at the control terminal. One end of the secondary winding is the reference potential for the mirror arrangement and the other goes to the anode of a diode.