Positioner for directional processing in production of monocrystalline semiconductor wafers

摘要

The fastening platelet (3) has at least one orthogonally etched window. An AIIIBV semiconductor wafer (8) to be positioned has an orthogonally split surface and is so fastened in the window of the Si fastening platelet (3) that, at the latter, etching edges abut the split faces of the semiconductor wafer. A spacer disc (4), located on the Si fastening platelet, has an aperture of at least the size of the semiconductor wafer and carries a slot mask (5) with the same outer contours as the Si fastening platelet. A three-point mechanism provides securing of aligned outer contours of the fastening platelet and the slot mask. There are guide pins (9) for vertical components and fasteners (10,10') after completed positioning.