| 摘要 |
FIELD: measurement technology, check of thickness of metal coats in process of their formation, specifically, during deposition of coats from vapor phase by pyrolythic method. SUBSTANCE: induction sensor includes case, four-pole core, primary and secondary induction windings and two thickness-calibrated dielectric substrates - standard and witness ones. Each substrate is pressed against corresponding pare of poles of core. Standard substrate that has metal coat deposited beforehand is closed by dielectric cover. Witness substrate is open for deposition of metal and is located in one plane with surface of check of part. EFFECT: expanded functional capabilities, possibility of check of process of deposition of coat of preset thickness on part of complex shape. 1 dwge
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