Calibration standard for profile meter for atomic force and scanning probe microscopes

摘要

The calibration standard comprises a step of defined height, which is formed micro-mechanically in the calibration standard (1) consisting of a single material. A multiple step system may be provided, which consist from several steps of equal height. The material of the calibration standard is a monocrystalline material, and preferably silicon. All steps comprise equal width, and the calibration standard is coated evenly.