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发明名称
HIGH BANDWITH, DYNAMICALLY RIGID METROLOGY SYSTEM FOR THE MEASUREMENT AND CONTROL OF INTELLIGENT MANUFACTURING PROCESSES
摘要
申请公布号
EP0846248(A1)
申请公布日期
1998.06.10
申请号
EP19960926883
申请日期
1996.08.05
申请人
KYRAZIS, DEMOS
发明人
KYRAZIS, DEMOS
分类号
G01B11/00;B23Q17/00;B25J9/16;B25J9/22;B25J19/02;G01B11/03;G01B11/24;(IPC1-7):G01B11/14;G01N21/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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