| 摘要 |
FIELD: testing semiconductor devices and integrated circuits. SUBSTANCE: test facility has laser emitter, laser-emitter modulator, light filter, laser beam amplitude equalizer, laser beam intensity monitoring unit, tested equipment terminal board, matching and switching unit, control computer with built-in software, setting-unit-to-computer coupling controller, pulse parameter storage device, electric measuring instrument, and tested equipment power supply. Installed in tandem and coaxially in front of laser radiator aperture are light filter, amplitude equalizer, and laser beam intensity monitoring unit or terminal board that mounts tested equipment whose leads are connected to its terminals. Prior to taking measurements, laser beam intensity monitoring unit is placed at point where tested equipment board terminal strip will be installed, and equivalent power of absorbed dose is measured at point of location of laser beam intensity monitoring unit; then the latter is replaced by terminal strip of tested equipment board placed in laser beam field at amplitude equalizer output, then radiation resistance level of tested equipment is determined. EFFECT: provision for automating test process; improved validity of test results. 13 dwgn
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