| 摘要 |
PCT No. PCT/JP95/02556 Sec. 371 Date Aug. 7, 1996 Sec. 102(e) Date Aug. 7, 1996 PCT Filed Dec. 13, 1995 PCT Pub. No. WO96/19733 PCT Pub. Date Jun. 27, 1996The present invention relates to an acceleration sensor which uses magnetic coupling to detect acceleration. A mass portion 3 is movably supported on a frame 2 by means of support beams 4. A first planar coil 5 is disposed on the mass portion 3, and a second planar coil 8 is provided facing the first planar coil 5 with a space therebetween. A transformer is made up with the first planar coil 5 as the primary winding and the second planar coil 8 as the secondary winding. Acceleration is obtained using magnetic coupling to detect the change in the distance between the coils, that is to say, the displacement of the mass portion. |
