发明名称 Gas discharge laser control systems using multiple CPU's with shared memory on a common bus
摘要 A laser control system with multiple CPU's having shared memory on a common bus to provide high performance, relatively lost-cost, laser control. In the system disclosed, a first CPU which handles most, if not all, communication to and from the laser control system and which may communicate with one or more additional CPU's through the shared memory, so as to be capable of providing the software and operating commands to one or more additional processors on the common bus. A second processor is provided to control the intensity and repetition rate of a gas laser responsive to the program and commands made available thereto through the shared memory by the first processor. In addition, the second processor may directly respond to specific controls provided thereto to allow operation of the laser directly in response to control signals provided thereto from the outside, rather than based on parameters provided thereto by the first processor. Additional processors may be provided on the common bus for other common, typically dedicated functions. The use of shared memory on a common bus for communication between processors allows automatic operation of a laser system through communication with only a single processor, simplifying system initialization and implementation of software updates. The controller is configured around a popular bus structure to make maximum use of commercially available board level subsystems to provide a highly versatile laser controller without requiring substantial and expensive special circuit board design and fabrication.
申请公布号 US5764505(A) 申请公布日期 1998.06.09
申请号 US19960589984 申请日期 1996.01.23
申请人 CYMER, INC. 发明人 MIXON, CURTISS LYNN;NAIR, II, RALPH KENNETH
分类号 H01S3/097;G03F7/20;H01S3/104;(IPC1-7):H01S3/00 主分类号 H01S3/097
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