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发明名称
SPUTTERING SYSTEM AND SPUTTERING METHOD
摘要
申请公布号
JPH10152773(A)
申请公布日期
1998.06.09
申请号
JP19960327551
申请日期
1996.11.22
申请人
SONY CORP
发明人
KITAGAWA KOJI
分类号
H05H1/46;C23C14/35;H01L21/203;(IPC1-7):C23C14/35
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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