| 摘要 |
PROBLEM TO BE SOLVED: To obtain a solar battery having low reflection factor and high energy conversion efficiency, by a method wherein a diffusion agent of only necessary quantity for diffusion is applied to wafer surface, and the diffusion agent is formed into such a low volatility that the unnecessary quantity is thrown away by rotational motion. SOLUTION: First, a silicon wafer 100 is rotated, and at the same time, a diffusion agent 1 is dripped on the surface of the silicon wafer 100. At this point, the diffusion agent 1 having the degree of volatility and allowing the unnecessary diffusion agent 1, which is not used for diffusion, to be thrown away by utilizing centrifugal force, is used. Then, the diffusion agent 1 is diffused on the wafer 100 in a diffusion furnace, and a diffusion layer 102 is formed. A TiO2 film 103 is uniformly formed on the N<+> diffusion layer 102 on the wafer 100. The reflection preventing film 103 can be formed in high refraction index. Lastly, electrode material is printed on the P-type electrode (backside electrode 104), an N-type electrode (front electrode 105), fired in a firing furnace, solder coated and the solar batter is obtained. |
