Fabrication method of semiconductor laser by MOVPE

摘要

A fabrication method of a semiconductor QW laser by MOVPE with a high fabrication yield, providing a laser device sufficiently reliable in operation over long period of time and applicable for optical communications. An InGaAs QW active layer is grown on a first semiconductor layer formed on or over a semiconductor substrate at a growth temperature ranging from 580 DEG to 640 DEG C. Then, a second semiconductor layer is grown on the active layer at the same growth temperature as that of the active layer. Preferably, the active layer is grown under a condition that the total pressure in a growth chamber is substantially equal to an atmospheric pressure and a partial pressure of arsine (AsH3) for As component ranges from 1.6x10-7 to 3x10-1 Torr.