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发明名称
ULTRASONIC VIBRATOR, ULTRASONIC CLEANING NOZZLE, ULTRASONIC CLEANING DEVICE, SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING TREATMENT SYSTEM AND MANUFACTURE OF ULTRASONIC CLEANING NOZZLE
摘要
申请公布号
JPH10151422(A)
申请公布日期
1998.06.09
申请号
JP19960313766
申请日期
1996.11.25
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
IZUMI AKIRA;KAWAKATSU TETSUO
分类号
B08B3/02;B08B3/12;H01L21/00;(IPC1-7):B08B3/12;H01L21/304
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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