SCANNING MICROSCOPE APPLIED DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a compounded apparatus (scanning microscope applied device) manufactured by making SEM(scanning electron microscope) apparatus with an observing and measuring device and a processing and treating device for specimen surface compound, without particularly enlarging the structure of these devices. SOLUTION: In an apparatus for observing and measuring of a specimen 3 set in a highly vacuum specimen chamber 17 or an apparatus for processing and treating the specimen 3, a converged electron beam radiating means 1 with miniaturized structure and by which electron beam converged to be thin is radiated to the surface of the specimen 3, while scanning the surface to observe the surface by scanning electron microscopic method is installed in the specimen chamber 17, and a gas discharging system to vacuum-evacuate the specimen chamber 17 is used in common as a gas-discharging system to vacuum-evacuate the inner space of the converged electron beam radiating means 1. Specimen chambers of various kinds of observing measuring apparatuses or processing-treating apparatus are provided with an SEM lens-barrel part with miniaturized structure as a converged electron beam radiating means and a vacuum-evacuating system is used in common, so that a compounded apparatus (scanning microscope-applied device) produced by compounding an observing- measuring apparatus or a processing-treating apparatus with a SEM apparatus can be provided, without enlarging the overall body of the compounded apparatus.