| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to generate a uniform beam while freely expanding/reducing without limit of a beam size between first, second lenses, by serially connecting three parts of a beam size control optical system, an intensity conversion optical system, and a phase adjustment optical system. SOLUTION: The beam shaping optical system is constituted of serially connecting three parts of the beam size control optical system, intensity conversion optical system, and phase adjustment optical system, and forms a target beam size by the beam size control optical system such as a beam expander, a zoom expander, a collimator, etc. This beam is laser light having a Gaussian distribution. This laser light is made a shape expanding a beam size in the central part of the lens and reversely reducing the beam size in the peripheral part in a certain distance by the intensity conversion optical system part, and beam power is uniformized specially. Although power is uniformized, a phase is disturbed. Then, the phase is corrected by the phase adjustment optical system part.</p> |
