| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate case storage rack, with which a cleaning degree can be kept high even when the quantity of clean air to be supplied is a little, concerning a rack for storing substrates, to which the cleaning degree is required, while putting them in dedicated cases. SOLUTION: A substrate case storage rack 1 has air blowing holes 11 for letting layered clean air currents selectively flow onto the upper and lower surfaces of stored substrate cases 5. Since air is not conventionally blown from the entire deep surface of substrate case storage rack but the air currents are selectively formed between the substrate cases, the flow of required clean air can be considerably reduced rather than the conventional one.</p> |
