ACTIVE MATRIX LIQUID CRYSTAL PANEL, AND PROJECTION SYSTEM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To increase a numerical aperture and to prevent display unevenness and light leakage by using a conductive light-shieldable film having apertures to expose a pixel electrode on the substrate surface of an array substrate having thin-film transistors (TFTs). SOLUTION: Metallic thin film 12 consisting of chromium(Cr) as the light- shieldable films selectively formed into a prescribed shapes in formed on the glass substrate 11 as the first substrate. Polycrystalline silicon films 14 as semiconductor layers consisting of ohmic regions 14a and channel regions 14b via first interlayer insulating films 13 consisting of silicon oxide (SiO2 ) are formed above the respective metallic thin films 12. In such a case, the metallic thin film 12, which is a light-shieldable film, has the apertures to expose the pixel electrode and completely shut off the direct light made incident perpendicularly on the array substrate surface from the array substrate side and, therefore, the light does not advance to the semiconductor regions of the TFT parts any more. The increase of the leak currents of the TRs by the light is thus prevented.