| 摘要 |
PROBLEM TO BE SOLVED: To lessen the deterioration of a refractory crucible and to prevent the leakage of a magnetic material by stepwise increasing electric power to be supplied to a high-frequency induction heating coil for heating an evaporation source by an electric power control means. SOLUTION: Co100 is housed as the magnetic material 10 into the refractory crucible 11a and a vacuum vessel is evacuated and is held at 5.0×10Torr. The heating and melting of the magnetic material 10 are executed by supplying 3.0KW as starting electric power to the high-frequency induction heating coil 12 by a high-frequency powder 20, then stepwise increasing the electric power to be supplied by 0.5KW each in one minute until 16KW is attained after 26 minutes. Further, the evaporation of the magnetic material 10 is executed for 34 minutes. Inter-coil shorting occurs once during 8 to 10 minutes after the start of the electric power supply but the continuous electric power supply is made possible by automatic resetting control. Two pieces among the cracks of the refractory crucible 11a extend over the entire width in a thickness direction and a soln. leaks from these parts indicating the trace of solidification in mid-way of the packing material but the leakage of the soln. is lessened.
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