| 摘要 |
<p>PROBLEM TO BE SOLVED: To connect source followers by two pieces parallel to each other and parallel to the advance direction of laser light, by connecting a data holding control signal to plural parallel-connected source followers. SOLUTION: Two kinds of source followers with threshold value voltages different from each other are formed alternately or at every plural pieces for the advance direction of the laser light. In a laser crystallization process, for eliminating an area that the laser light doesn't irradiate, the laser light irradiates so as to overlap a first irradiation area. The, the width of the irradiation of the laser light is made integer number times or nearly integer number times of the width of the source follower. In such a manner, by making the length of the overlapped part of the irradiation area of the laser light the integer number times of the width of the source follower, the source followers with the different irradiation amount of the laser light are oriented regularly in the moving direction of the laser light to be formed. Thus, dispersion in a characteristic caused by laser irradiation is reduced.</p> |
