| 摘要 |
PROBLEM TO BE SOLVED: To measure accurately the line width of an electrode, by a method wherein the electrode and a plurality of lines, which are extended from both end parts of the electrode and have a constant line width and a constant length, are formed on a substrate, and the lines are made wider than that of the electrode. SOLUTION: A gate electrode 12 is extended on the active region 11 of the surface part of a substrate 10 in such a way as to cross the region 11, and source and drain regions 13 are formed in the region 11 on both sides of the electrode 12. Moreover, a plurality of lines 14 are extended from both end parts of the electrode 12. The line width W1 of the electrode 12 is smaller than the line width W2 of the lines 14. The reason is that, when the line width W1 of the electrode 12 is measured using an electronic microscope, the line width W2 of the lines 14 is made larger than that of the electrode 12 to identify the line width W2, so that the line width W1, which is located in the source and the drain regions 13, of the electrode 12 can be accurately measured. Therefore, a change in the line width of the gate electrode can be easily compared with a change in the characteristics of a transistor. |
