FERROELECTRIC ELEMENT AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a ferroelectric element which has an improved yield, by suppressing element damage or improper characteristics, and also by suppressing an irregularly slid formation at the time of forming a ferroelectric film. SOLUTION: Sequentially formed on a substrate 11 are an adhesion laser 12, a lower electrode 13, a ferroelectric film 14 and an upper electrode 15 to form a ferroelectric element. The adhesion layer 12 is made of a material of the lower electrode 13 and oxygen. The ferroelectric film 14 is made by a spattering process using an oxygen as a target in an argon gas atmosphere, and then by a spattering process using the oxygen as a target in an argon gas atmosphere containing an oxygen gas.