申请人 |
HERAEUS QUARZGLAS GMBH, 63450 HANAU, DE;SHIN-ETSU QUARTZ PRODUCTS CO., LTD., TOKIO/TOKYO, JP |
发明人 |
SATO, TATSUHIRO, TAKEFU-SHI, FUKUI, JP;FUJINOKI, AKIRA, KORIYAMA-SHI, FUKUSHIMA, JP;INAKI, KYOICHI, KORIYAMA-SHI, FUKUSHIMA, JP;YOSHIDA, NOBUMASA, KORIYAMA-SHI, FUKUSHIMA, JP;YOKOTA, TORU, KORIYAMA-SHI, FUKUSHIMA, JP |