| 发明名称 |
CERAMIC ELEMENT, METHOD OF MANUFACTURING CERAMIC ELEMENT, DISPLAY, RELAY DEVICE, AND CAPACITOR |
| 摘要 |
<p>There are provided an actuator part main body (26) which has an antiferroelectric film (22) and a pair of electrodes (24a and 24b) formed on one major face (surface) of the antiferroelectric film (33), a vibratory part (18) which supports the actuator part main body (26), and a fixed part (20) which supports the vibratory part (18) in such a way that it can vibrate. The antiferroelectric film (22) has a region Zt of which the mean permittivity increases in an analog manner in accordance with the voltage V impressed to the paired electrodes (24a and 24b). Specifically, p/t</=2.5 is satisfied where t is the average film thickness of the antiferroelectric film (22) and p is the pitch between the paired electrodes (24a and 24b). Accordingly, the amount of mechanical displacement changes in an analog manner in accordance with the impressed voltage, and after the impression of a drive voltage, the amount of displacement equivalent to that when the drive voltage is impressed can be maintained.</p> |
| 申请公布号 |
WO9824130(A1) |
申请公布日期 |
1998.06.04 |
| 申请号 |
WO1997JP04371 |
申请日期 |
1997.11.28 |
| 申请人 |
NGK INSULATORS, LTD.;TAKEUCHI, YUKIHISA;KASHIWAYA, TOSHIKATSU;TAKAHASHI, NOBUO |
发明人 |
TAKEUCHI, YUKIHISA;KASHIWAYA, TOSHIKATSU;TAKAHASHI, NOBUO |
| 分类号 |
B06B1/06;B41J2/14;C04B35/493;G02B26/08;G09F9/37;H01G5/18;H01G7/06;H01H1/00;H01H57/00;H01L41/047;H01L41/09;H01L41/107;H01L41/187;H01L41/39;H03H9/17;(IPC1-7):H01L41/09;H01L41/24 |
主分类号 |
B06B1/06 |
| 代理机构 |
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| 主权项 |
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