发明名称 COMPOSITION AND METHOD FOR POLISHING RIGID DISKS
摘要 <p>A method for polishing computer rigid disks comprising bringing at least one surface of the rigid disk into contact with a polishing pad and applying a dispersion to the rigid disk to give a polished rigid disk having an rms roughness less than about 1.4 nm. Also disclosed is a dispersion and polishing slurry for polishing rigid disks.</p>
申请公布号 WO1998023697(A1) 申请公布日期 1998.06.04
申请号 US1997021730 申请日期 1997.11.21
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