볼록형 스퍼터링 타겟,申请号KR19960026567U-传众专利搜索

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发明名称	볼록형 스퍼터링 타겟
摘要	<p>본 고안은 스퍼터링 공정에 사용되지 않는 스퍼터링 타겟의 부분을 전체적으로 얇게 형성하고, 스퍼터링 공정에 사용되는 스퍼터링 타겟의 부분을 볼록하게 형성하여 원자재비를 절감할 수 있고, 타겟의 교환주기를 연장하여 설비 가동률을 향상시킬 수 있다.</p>
申请公布号	KR19980012978(U)	申请公布日期	1998.06.05
申请号	KR19960026567U	申请日期	1996.08.29
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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