Two-fluid cleaning jet nozzle for cleaning semiconductor wafers during production

摘要

The nozzle has an accelerator for driving the droplets into the atmosphere. The cross-sectional face of the narrowest section of the gas passage in the atomiser is larger than that of the narrowest section of a passage in the accelerator, which contains a straight tube with a circular bore, 30 to 200 mm long and bore area of 3 sq. mm. The tube bore diverges as the bore of a Laval nozzle from the end, coupled to the atomiser, in the direction of the droplet ejection direction. Typically the atomiser is cylindrical. The atomiser configuration may provide convergence in the direction of the end coupled to the accelerator.