Anordnung zur dreiachsigen Messung von Beschleunigungen

摘要

The arrangement consists of at least two individual sensors (2a-d) on a common substrate each with a principal sensitivity axis. Each sensor has a cantilevered paddle (3a-d) connected to a transverse beam (4a-d) with a centre of gravity (Sa,Sb,Sc) as a seismic mass. Each transverse beam has means for measuring the deflection of the seismic mass and are arranged in parallel with the surface of the substrate. The principal sensitivity axes of each individual sensor has a displacement angle ( alpha ) to the normals of the substrate surface.