ACTIVE MATRIX LIQUID CRYSTAL DISPLAY

摘要

A thin film transistor used as a switching element of an active matrix liquid crystal display is an enhancement-mode thin film transistor including a silicon nitride film (13) formed over a scanning electrode (12), an insulating layer (14) formed over the silicon nitride film (13), and a semiconductor layer having a source region (17) and a drain region (18) formed over the insulating layer (14). The thin film transistor has a threshold voltage higher than the maximum of the liquid crystal operating voltage. The insulating layer (14) is a silicon oxide film having a thickness of 30 angstroms or more.