发明名称 |
TENSOMETRIC GAS AND LIQUID PRESSURE SENSING ELEMENT |
摘要 |
A tensometric fluid pressure sensing element with a main circular diaphragm provided on its edge with at least two recesses each forming a smaller diaphragm carrying resistors in a bridge circuit. The main diaphragm is preferably made of a semiconductor material and the resistors on the smaller diaphragms are diffused therein.
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申请公布号 |
US3683698(A) |
申请公布日期 |
1972.08.15 |
申请号 |
USD3683698 |
申请日期 |
1971.05.14 |
申请人 |
CESKOSLOVENSKA AKADEMIE VED |
发明人 |
LADISLAV TOMANEC;KAREL POSPISIL |
分类号 |
G01L9/00;(IPC1-7):G01L9/06 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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