发明名称 Multilayer wiring structure including via holes
摘要 <p>The semiconductor device according to the present invention includes a first wiring formed on a first insulating film, a second insulating film provided on the first wiring, a second wiring provided on the second insulating film, and a plurality of via holes for electrically connecting the first wiring and the second wiring where the first wiring and the second wiring intersect, provided in a via hole formation region, wherein the first wiring is divided in the via hole formation region into a first branch wiring and a second branch wiring, and the widths of the first branch wiring and the second branch wiring are respectively 7 mu m or less. <IMAGE></p>
申请公布号 EP0845808(A2) 申请公布日期 1998.06.03
申请号 EP19970120013 申请日期 1997.11.14
申请人 NEC CORPORATION 发明人 KINOSHITA, MASAAKI
分类号 H01L21/3205;H01L21/768;H01L23/52;H01L23/522;H01L23/528;(IPC1-7):H01L23/522 主分类号 H01L21/3205
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