摘要 |
<p>A plasma enhanced gas reactor including a reaction chamber has a pair of field enhancing electrodes 106,107 each of which has an axial passage there through, one admitting a first reactant gas 201 and the other removing processed reactant, a second reactant 203 being flowed so at to intersect the first reactant in the region of the plasma 202. Other relationships between plasma and reactant are shown (fig 2b-2e). As shown in fig 3 a plurality of such reactors may be established in parallel.</p> |