Method for manufacturing accelerometers using the silicon on insulator technology

摘要

This method comprises the following steps: a) making a film (32) of conducting monocrystalline silicon on a silicon substrate (8) and separated from the latter by an insulating layer (28); b) etching the silicon film (32) and the insulating layer (28) down to the substrate (8) in order to fix the form of the moving parts (2, 6) and of the measurement means (12, 20, 16); c) making electrical contacts (24, 26) for the measurement means; d) partially removing the insulating layer (32) in order to uncover the moving parts (2, 6), the rest of the insulating layer (28) being used for joining the moving parts and the substrate.