Microdevice valve structures for fluid control

摘要

A valve array system including microelectromechanical valves (27,37,43) embedded in a dielectric substrate (51-56) is disclosed. These microelectromechanical valves (27,37,43) can be batch fabricated using resin impregnated dielectric laminates having photolithographically formed circuitry for electrical connections. Movable components of valves, including electromagnetic or electrostatically actuated membranes, flaps, or beams, can be formed from laminate material using sacrifice layers and etching. <IMAGE>