Method for producing a prism coupler and a prism coupler produced by the method

摘要

A method for producing a prismcoupler includes the steps of: forming a waveguide structure on a substrate (11); forming a photoresist layer (20) having a groove (23) on the waveguide structure; mounting a prism (14) on the photoresist layer so as to partially cover the groove; bonding the prism on the waveguide structure by injecting an adhesive (15) into the groove; and removing the photoresist layer. The groove has a T-shaped pattern (21) including a transverse section extending in a first direction (N) and a longitudinal section extending in a second direction (M) perpendicular to the first direction. The transverse section has a first length (L1) in the first direction which is greater than the first length of the bonding face of the prism in the first direction. The longitudinal section has a second length (L2) in the second direction which is greater than the second length of the bonding face of the prism in the second direction. The adhesive is injected into an end portion (23A) of the longitudinal section which is distanced away from the transverse section, the end portion not being covered by the prism.