发明名称 SEED CRYSTAL FOR GROWING MONOCRYSTALS, USE OF THE SEED CRYSTAL AND PROCESS FOR PRODUCING SiC MONOCRYSTALS OR MONOCRYSTALLINE SiC LAYERS
摘要 A seed crystal assembly for producing monocrystals and a method for producing SiC monocrystals or monocrystalline SiC layers include a seed crystal with a surface having a first partial region intended as a crystallization surface for a monocrystal grown out of a gas phase and a second partial region with a coating that is chemically resistant to the seed crystal and to the gas phase and does not melt at the growth temperatures. As a result, thermal degradation of the seed crystal is avoided and the quality of the monocrystals which are produced is increased.
申请公布号 EP0845055(A1) 申请公布日期 1998.06.03
申请号 EP19960920724 申请日期 1996.06.27
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 VOELKL, JOHANNES;STEIN, RENE
分类号 C30B23/00;C30B23/02;C30B23/04;C30B25/02;C30B25/18;C30B29/36 主分类号 C30B23/00
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