SUBSTRATE FOR INSPECTION HAVING CAPACITOR CHARGING CIRCUIT AND INSPECTION METHOD FOR INTEGRATED CIRCUIT ELEMENT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To shorten the inspection time by connecting a capacitor charging circuit through a switch between a specific input terminal and a capacitor, and quickly stabilizing the impressing bias to an element to be inspected. SOLUTION: Switches S1 and S2 are controlled by an inspector device so as to be simultaneously opened and closed. If the switch S1 and S2 are closed, the input terminal 24 and the output terminal 26 of the capacitor charging circuit 20 are connected to the negative input terminal 3 (specific input terminal) of each element 10 and a capacitor Ci. If the switches S1 and S2 are maintained in closed state for a few millisecond, the capacitor Ci is charged by the current driven through the output terminal 26 of the capacitor charging circuit 20. If the switch S1 and S2 are opened the voltage charged in the capacitor Ci is impressed in the input terminal 3 of the shadow of the element 10. At this moment, if the function current of the element 10 is measured, an integrated circuit element can be inspected in a quite short time.