| 摘要 |
PROBLEM TO BE SOLVED: To compress pattern data expanded due to the development of mask data processing. SOLUTION: A data group consisting of a repeating interval dx and repeating frequency dn in the x-axis direction of identical shape patterns constituting a pattern group and a repeating interval dy and repeating frequency in the y-axis direction is extracted (S2). Whether the same data group as the extracted data group exists in already registered data or not is judged, and at the time of judging the absence of the data group (S3: No), a new index is added to the extracted data group (S4). Then the coodrinate data of the pattern group, the new index and the shape data of patterns constituting the pattern group are registered in a 1st table and the new index and the data group are registered in a 2nd table (S5). At the time of judging the existence of the data group (S3: Yes), an index annexed to the same data group is referred to, the coordinate data of the pattern group, the referred index and the shape data of patterns constituting the pattern group are registered in the 1st table (S7). |
