SUBSTRATE TREATING DEVICE,申请号JP19960309562-传众专利搜索

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发明名称	SUBSTRATE TREATING DEVICE
摘要
申请公布号	JPH10149965(A)	申请公布日期	1998.06.02
申请号	JP19960309562	申请日期	1996.11.20
申请人	SONY CORP	发明人	TANIGUCHI MIKIO
分类号	H01L21/302;H01L21/02;H01L21/3065;(IPC1-7):H01L21/02;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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