CASSETTE TRANSPORTING ROBOT AND SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a cassette transporting robot which can simplify structures of associated devices or simplify its own mechanism with reduced costs, suppressed leakage and an improved reliability. SOLUTION: Robots 47 and 48 for transporting a wafer cassette 20 have a robot arm 50 which includes a plurality of pivotably connected links and a rotable cassette receive flange 49 for carrying the wafer cassette 20. Extension or contraction of the robot arm 50 causes the flange 49 to be rotated by a predetermined angle. During the extending or contracting operation of the robot arm 50, the wafer cassette 20 is rotated by the predetermined angle and shifted onto a cassette table 45 with the orientation of the cassette 20 aligned.