Method of making an antifuse structure using a metal cap layer
摘要
An antifuse includes a metal cap layer located at the second barrier layer of the antifuse to improve the antifuse yield and long term reliability. An antifuse further includes one or more interfacial oxide film layers surrounding an antifuse dielectric layer to provide narrowing of the antifuse programming voltage distribution and to further improve the antifuse yield and long term reliability.
申请公布号
US5759876(A)
申请公布日期
1998.06.02
申请号
US19950551588
申请日期
1995.11.01
申请人
UNITED TECHNOLOGIES CORPORATION
发明人
SINGLEVICH, SCOTT G.;HOLWAY, BRADLEY S.;HUMPHREY, KURT D.;POARCH, BRIAN SCOTT;REEDER, MICHAEL R.;VERZWYVELT, NEAL J.