ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To lower the specific resistance and film stress of elements constituting signal transmission lines by forming the signal transmission lines of metallic films contg. Ne atoms in Cr films. SOLUTION: Plural gate wirings 12 and drain wirings 14 are arrayed in a matrix form via insulating members on a glass substrate. Transparent pixel electrodes 16 are formed in the display regions enclosed by the gate wirings 12 and the drain wirings 14. TFT elements (semiconductor active elements for driving pixels) are formed adjacently to these transparent pixel electrodes 16 on the glass substrate in the display regions. For example, the gate wirings (scanning lines) 12 and the drain wirings (data signal lines) 14 are formed of the metallic films contg. the Ne atoms in the Cr films as the elements constituting the signal transmission lines for transmitting the electric signals associated with the driving of the TFT elements. The specific resistance of the metallic films is <=22μΩcm and the absolute value of the film stress of the metallic film is <=200MPa.