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经营范围
发明名称
PLASMA CVD SYSTEM
摘要
申请公布号
JPH10147878(A)
申请公布日期
1998.06.02
申请号
JP19960308029
申请日期
1996.11.19
申请人
KOKUSAI ELECTRIC CO LTD
发明人
YASHIMA SHINJI
分类号
C23C16/50;H01L21/205;H01L21/31;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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