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发明名称
MANUFACTURE OF MIS TRANSISTOR
摘要
申请公布号
JPH10150111(A)
申请公布日期
1998.06.02
申请号
JP19960305080
申请日期
1996.11.15
申请人
DENSO CORP
发明人
HASEBE YUJI
分类号
H01L21/28;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L21/823
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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