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发明名称
PLASMA REACTOR
摘要
申请公布号
JPH10150025(A)
申请公布日期
1998.06.02
申请号
JP19960309141
申请日期
1996.11.20
申请人
MITSUBISHI ELECTRIC CORP
发明人
OGINO MASARU;MARUYAMA TAKAHIRO
分类号
H05H1/46;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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