| 摘要 |
<p>PROBLEM TO BE SOLVED: To manufacture a thin film diode which is excellent in switching characteristics and capable of restraining an after image phenomenon from occurring so as to improve a liquid display device in display quality. SOLUTION: A lower electrode 13 of tantalum nitride film is formed on an LCD substrate 1, an anodic oxide film 15 is formed on the surface of the lower electrode 13 through an anodizing treatment, a first thermal treatment is carried out in a vacuum, and a second thermal treatment is carried out in a vacuum before or after a process where an upper electrode 17 of transparent conductive film is formed and patterned on the anodized film 15. By this setup, through the control of the anodized film in excess oxygen and oxygen deficiency which dominates a Poole-Frenkel conduction, a thin film diode can be controlled in current-voltage characteristics so as to be optimal for the drive of liquid crystal.</p> |
