| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cutoff opening unit whereby a fluid is quickly replaced to ensure purity of the fluid. SOLUTION: A valve main unit 39 of a valve 7 has a first fluid inflow passage 61, second fluid inflow passage 63, and an outflow passage 64 in common to a first/second fluid. The first fluid inflow passage 61 and the common outflow passage 64 are always connected through a valve chamber 62. The second fluid inflow passage 63 communicates with the first fluid inflow passage 61 and the common outflow passage 64 through the valve chamber 62, and this communication is cutoff and opened by a valve element 67.</p> |
