| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film photoelectric conversion element, which is large in area, is superior in characteristics and has a good evenness, by a method wherein while a cassette having a roll wound with a flexible film substrate is mounted to film-forming chambers, which are independent of each other, and is detached from the film-forming chambers in order, a laminated film is formed. SOLUTION: A plurality of thin films of different natures are continuously laminated on a stripped flexible film substrate while the substrate is carried and a photoelectric conversion layer is formed to manufacture a thin film photoelectric conversion element. In that case, a cassette 4 having at least one roll wound with the flexible film substrate is used and while the cassette 4 is mounted to film-forming chambers 7 and 8, which are chambers for forming each layer and are independent of each other, and is detached from the chambers 7 and 8 in order, a laminated film is formed. For example, a manufacturing device of a structure, wherein a preparation chamber 5, a pretreating chamber 6, electrode film-forming chambers 7 using a sputtering method and semiconductor layer film-forming chambers 8 using a chemical vapor growth method are arranged on the periphery of a common vacuum chamber 9 provided with a moving unit 14 for the cassette 4, is used. The pretreating chamber 6 is used as one for performing a plasma treatment of the substrate and a vacuum heating treatment of the substrate. |
